"XY Stage Capable of Positioning in Submicron Order."

Hiroshi Goto (1989)

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DOI: 10.20965/JRM.1989.P0333

access: closed

type: Journal Article

metadata version: 2020-04-01

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Hiroshi Goto:
XY Stage Capable of Positioning in Submicron Order. J. Robotics Mechatronics 1(4): 333-337 (1989)

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