"Silicon Microvalves and Their Applications."

Masayoshi Esashi (1991)

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DOI: 10.20965/JRM.1991.P0028

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type: Journal Article

metadata version: 2020-04-01

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Masayoshi Esashi:
Silicon Microvalves and Their Applications. J. Robotics Mechatronics 3(1): 28-33 (1991)

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