"A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication."

Ge Yang, James A. Gaines, Bradley J. Nelson (2003)

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DOI: 10.1023/A:1023982907874

access: closed

type: Journal Article

metadata version: 2021-05-07

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Ge Yang, James A. Gaines, Bradley J. Nelson:
A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication. J. Intell. Robotic Syst. 37(1): 43-68 (2003)

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