"Advanced semiconductor fabrication process control using dual filter ..."

Hyo-Heon Ko et al. (2012)

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DOI: 10.1007/S10845-010-0383-6

access: closed

type: Journal Article

metadata version: 2024-05-07

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Hyo-Heon Ko, Jihyun Kim, Sang-Hoon Park, Jun-Geol Baek, Sung-Shick Kim:
Advanced semiconductor fabrication process control using dual filter exponentially weighted moving average. J. Intell. Manuf. 23(3): 443-455 (2012)

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