"A run-to-run controller for a chemical mechanical planarization process ..."

Sinyoung Kim, Jaeyeon Jang, Chang Ouk Kim (2021)

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DOI: 10.1007/S10845-020-01639-1

access: closed

type: Journal Article

metadata version: 2022-01-03

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Sinyoung Kim, Jaeyeon Jang, Chang Ouk Kim:
A run-to-run controller for a chemical mechanical planarization process using least squares generative adversarial networks. J. Intell. Manuf. 32(8): 2267-2280 (2021)

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