"Machine learning enabled optimization of showerhead design for ..."

Zeqing Jin et al. (2024)

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DOI: 10.1007/S10845-023-02082-8

access: closed

type: Journal Article

metadata version: 2024-02-29

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  - https://dblp.org/rec/journals/jim/JinLZMRG24
Zeqing Jin, Dahyun Daniel Lim, Xueying Zhao, Meenakshi Mamunuru, Sassan Roham, Grace X. Gu:
Machine learning enabled optimization of showerhead design for semiconductor deposition process. J. Intell. Manuf. 35(2): 925-935 (2024)

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