"Development of Digital Vacuum Pressure Sensor Using MEMS Analog Pirani Gauge."

Young Seek Cho (2017)

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DOI: 10.6109/JICCE.2017.15.4.232

access: open

type: Journal Article

metadata version: 2021-02-16

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Young Seek Cho:
Development of Digital Vacuum Pressure Sensor Using MEMS Analog Pirani Gauge. J. Inform. and Commun. Convergence Engineering 15(4) (2017)

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