"Low stress TAN thin film Development for MEMS/Sensor electrode Application."

Xiaoxu Kang et al. (2013)

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DOI: 10.1142/S0218126613400173

access: closed

type: Journal Article

metadata version: 2023-07-19

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Xiaoxu Kang, Qingyun Zuo, Chao Yuan, Shoumian Chen, Yuhang Zhao:
Low stress TAN thin film Development for MEMS/Sensor electrode Application. J. Circuits Syst. Comput. 22(9) (2013)

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