"Bi-LSTM-Based Dynamic Prediction Model for Pulling Speed of Czochralski ..."

Zhengyuan Feng et al. (2023)

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DOI: 10.1115/1.4056138

access: closed

type: Journal Article

metadata version: 2023-08-15

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Zhengyuan Feng, Xiaoliang Hu, Zengguo Tian, Baozhu Jiang, Hongshuai Zhang, Wanli Zhang:
Bi-LSTM-Based Dynamic Prediction Model for Pulling Speed of Czochralski Single-Crystal Furnace. J. Comput. Inf. Sci. Eng. 23(4) (2023)

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