"Sonderforschungsbereich 379 "Mikromechanische Sensor- und Aktorarrays". ..."

Thomas Geßner et al. (2001)

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DOI: 10.1524/ITIT.2001.43.5.282

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type: Journal Article

metadata version: 2023-08-28

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Thomas Geßner, Wolfgang Seckel, Göran Herrmann, Reinhard Streiter:
Sonderforschungsbereich 379 "Mikromechanische Sensor- und Aktorarrays". Grundlagenforschung mit Anwendungsbezug auf dem Gebiet der Mikrosystemtechnik an der TU Chemnitz. Informationstechnik Tech. Inform. 43(5): 282-286 (2001)

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