"Collaborative Research Center 516: Design and Manufacturing of Active ..."

Stephanus Büttgenbach (2007)

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DOI: 10.1524/ITIT.2007.49.3.194

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type: Journal Article

metadata version: 2023-08-28

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Stephanus Büttgenbach:
Collaborative Research Center 516: Design and Manufacturing of Active Micro Systems (Sonderforschungsbereich 516: Konstruktion und Fertigung aktiver Mikrosysteme). it Inf. Technol. 49(3): 194- (2007)

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