"Enhanced kalman-filtering iterative learning control with application to a ..."

Yang Liu et al. (2020)

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DOI: 10.1016/J.INS.2020.05.125

access: closed

type: Journal Article

metadata version: 2023-02-17

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Yang Liu, Li Li, Xiaofeng Yang, Jiubin Tan:
Enhanced kalman-filtering iterative learning control with application to a wafer scanner. Inf. Sci. 541: 152-165 (2020)

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