"Recent advances in MEMS sensor technology - thermo-fluid and ..."

Farbod Khoshnoud, Clarence W. de Silva (2012)

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DOI: 10.1109/MIM.2012.6204868

access: closed

type: Journal Article

metadata version: 2017-05-28

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Farbod Khoshnoud, Clarence W. de Silva:
Recent advances in MEMS sensor technology - thermo-fluid and electro-magnetic devices. IEEE Instrum. Meas. Mag. 15(3): 16-20 (2012)

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