"Carbon as a MEMS material: micro and nanofabrication of pyrolysed ..."

Chunlei Wang et al. (2008)

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DOI: 10.1504/IJMTM.2008.016782

access: closed

type: Journal Article

metadata version: 2022-10-02

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Chunlei Wang, Rabih Zaouk, Benjamin Y. Park, Marc J. Madou:
Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon. Int. J. Manuf. Technol. Manag. 13(2/3/4): 360-375 (2008)

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