"Roughness characterisation of gas phase micromachining process suitable ..."

Muthukuruman Packirisamy, Ion Stiharu, L. Flores (2005)

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DOI: 10.1504/IJMTM.2005.006842

access: closed

type: Journal Article

metadata version: 2020-06-04

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Muthukuruman Packirisamy, Ion Stiharu, L. Flores:
Roughness characterisation of gas phase micromachining process suitable for fabricating silicon based microsystems. Int. J. Manuf. Technol. Manag. 7(2/3/4): 224-245 (2005)

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