"Review of MEMS metrology solutions."

James F. Nichols, Meghan Shilling, Thomas R. Kurfess (2008)

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DOI: 10.1504/IJMTM.2008.016781

access: closed

type: Journal Article

metadata version: 2020-06-04

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James F. Nichols, Meghan Shilling, Thomas R. Kurfess:
Review of MEMS metrology solutions. Int. J. Manuf. Technol. Manag. 13(2/3/4): 344-359 (2008)

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