"Interbay Automated Material Handling System stocker design for wafer ..."

Chiahung J. Lin et al. (2000)

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DOI: 10.1504/IJMTM.2000.001344

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type: Journal Article

metadata version: 2020-06-04

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Chiahung J. Lin, Taho Yang, Jose M. Padillo, Debbie Beres:
Interbay Automated Material Handling System stocker design for wafer fabrication facilities. Int. J. Manuf. Technol. Manag. 1(2/3): 147-155 (2000)

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