"Separation of scanning error motions for surface profile measurement of ..."

Wei Gao et al. (2006)

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DOI: 10.1504/IJMR.2006.011958

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type: Journal Article

metadata version: 2024-07-03

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Wei Gao, Atsushi Shibuya, Yasuo Yoshikawa, Satoshi Kiyono, C. H. Park:
Separation of scanning error motions for surface profile measurement of aspheric micro lens. Int. J. Manuf. Res. 1(3): 267-282 (2006)

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