"Piezoresistive Ring-Shaped AFM Sensors with Pico-Newton Force Resolution."

Zhuang Xiong et al. (2013)

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DOI: 10.4018/IJIMR.2013010104

access: closed

type: Journal Article

metadata version: 2020-09-17

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Zhuang Xiong, Benjamin Walter, Estelle Mairiaux, Marc Faucher, Lionel Buchaillot, Bernard Legrand:
Piezoresistive Ring-Shaped AFM Sensors with Pico-Newton Force Resolution. Int. J. Intell. Mechatronics Robotics 3(1): 38-52 (2013)

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