"Neural Network Modeling of PECVD SiN Films and Its Optimization Using ..."

Seung-Soo Han (2001)

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DOI: —

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type: Journal Article

metadata version: 2020-07-03

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Seung-Soo Han:
Neural Network Modeling of PECVD SiN Films and Its Optimization Using Genetic Algorithms. Int. J. Fuzzy Log. Intell. Syst. 1(1): 87-94 (2001)

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