"Laterally Isolated Polysilicon Beam Process."

Ranganathan Nagarajan, Ajay Agarwal (2003)

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DOI: 10.1142/S1465876303001125

access: closed

type: Journal Article

metadata version: 2020-07-09

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Ranganathan Nagarajan, Ajay Agarwal:
Laterally Isolated Polysilicon Beam Process. Int. J. Comput. Eng. Sci. 4(2): 297-301 (2003)

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