"Prevent Notching For Soi Microstructure Fabrication Using SIO2 ..."

J. Li, Q. X. Zhang, A. Q. Liu (2003)

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DOI: 10.1142/S1465876303001794

access: closed

type: Journal Article

metadata version: 2020-07-09

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J. Li, Q. X. Zhang, A. Q. Liu:
Prevent Notching For Soi Microstructure Fabrication Using SIO₂ Thin Film Technique. Int. J. Comput. Eng. Sci. 4(3): 577-580 (2003)

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