"Micromechanical Thermal Converter Device Based On Polyimide-Fixed Island ..."

Tibor Lalinsky et al. (2003)

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DOI: 10.1142/S146587630300171X

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type: Journal Article

metadata version: 2021-02-02

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Tibor Lalinsky, M. Krnac, S. Hascik, Z. Mozolova, L. Matay, I. Kostic, P. Hrkut, Jiri Jakovenko, Miroslav Husák:
Micromechanical Thermal Converter Device Based On Polyimide-Fixed Island Structure. Int. J. Comput. Eng. Sci. 4(3): 543-546 (2003)

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