"Advanced Silicon Micromachining."

Thomas Gessner et al. (2003)

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DOI: 10.1142/S146587630300082X

access: closed

type: Journal Article

metadata version: 2020-07-09

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Thomas Gessner, Andreas Bertz, Christian Lohmann, Steffen Kurth, Karla Hiller:
Advanced Silicon Micromachining. Int. J. Comput. Eng. Sci. 4(2): 151 (2003)

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