"Sub-Micron Patterning Titanium Nitride By Focused Ion-Beam Technique."

Jianxia Gao et al. (2003)

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DOI: 10.1142/S1465876303001617

access: closed

type: Journal Article

metadata version: 2020-07-09

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  - https://dblp.org/rec/journals/ijces/GaoCXNY03
Jianxia Gao, Mary B. Chan-Park, Dongzhu Xie, Bryan K. A. Ngoi, Chee Yoon Yue:
Sub-Micron Patterning Titanium Nitride By Focused Ion-Beam Technique. Int. J. Comput. Eng. Sci. 4(3): 501-504 (2003)

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