"Static And Dynamic Characterization Of Mems Via ESPI."

Andreas H. Foitzik et al. (2003)

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DOI: 10.1142/S1465876303001538

access: closed

type: Journal Article

metadata version: 2020-07-09

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Andreas H. Foitzik, Wolfgang Kaese, Thomas Vogt, Michael Sommerer, Serguei Arkhipov:
Static And Dynamic Characterization Of Mems Via ESPI. Int. J. Comput. Eng. Sci. 4(3): 467-470 (2003)

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