"A New Modeling Method Of Vertical Electrostatic Comb Drive."

J. C. Chiou, Y. J. Lin (2003)

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DOI: 10.1142/S1465876303001940

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type: Journal Article

metadata version: 2020-07-09

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J. C. Chiou, Y. J. Lin:
A New Modeling Method Of Vertical Electrostatic Comb Drive. Int. J. Comput. Eng. Sci. 4(3): 641-644 (2003)

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