"Sputtered Silicon Dioxide Films For Mems Application."

Sudhir Chandra, Vivekanand Bhatt, Shrawan K. Jha (2003)

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DOI: 10.1142/S1465876303001666

access: closed

type: Journal Article

metadata version: 2020-07-09

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Sudhir Chandra, Vivekanand Bhatt, Shrawan K. Jha:
Sputtered Silicon Dioxide Films For Mems Application. Int. J. Comput. Eng. Sci. 4(3): 521-524 (2003)

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