"Design Optimization, Fabrication And Testing Of A Capacitive Silicon ..."

K. N. Bhat et al. (2003)

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DOI: 10.1142/S1465876303001575

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type: Journal Article

metadata version: 2020-07-09

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K. N. Bhat, B. R. K. Reddy, V. Vinoth Kumar, K. Siva Kumar, Y. Sushma, N. Ramesh Babu, K. Natarajan:
Design Optimization, Fabrication And Testing Of A Capacitive Silicon Accelerometer Using An Soi Approach. Int. J. Comput. Eng. Sci. 4(3): 485-488 (2003)

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