"Preparation and performance study of TiN films deposited by MF unbalanced ..."

Y. C. Zhang et al. (2007)

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DOI: 10.1504/IJCAT.2007.015257

access: closed

type: Journal Article

metadata version: 2020-09-17

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Y. C. Zhang, Y. F. Wu, S. G. Ma, S. N. Sun, Y. Zhou, M. Geng:
Preparation and performance study of TiN films deposited by MF unbalanced magnetron sputtering technique. Int. J. Comput. Appl. Technol. 29(2/3/4): 173-177 (2007)

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