"Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC ..."

Chengwu Wang et al. (2018)

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DOI: 10.20965/IJAT.2018.P0187

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type: Journal Article

metadata version: 2022-10-02

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Chengwu Wang, Syuhei Kurokawa, Julong Yuan, Li Fan, Huizong Lu, Zhe Wu, Weifeng Yao, Kehua Zhang, Yu Zhang, Toshiro Doi:
Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate. Int. J. Autom. Technol. 12(2): 187-198 (2018)

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