"Pneumatic Servo Bearing Actuator with Multiple Bearing Pads for ..."

Shuhei Tsujimura et al. (2013)

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DOI: 10.20965/IJAT.2013.P0498

access: closed

type: Journal Article

metadata version: 2024-10-06

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Shuhei Tsujimura, Yusuke Hashimoto, Takashi Matsuoka, Tomoko Hirayama, Katsumi Sasaki:
Pneumatic Servo Bearing Actuator with Multiple Bearing Pads for Ultraprecise Positioning. Int. J. Autom. Technol. 7(5): 498-505 (2013)

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