"Fabrication of Less than 20-nm-Diameter Nanodot Arrays Using Inorganic ..."

Jun Taniguchi, Tetsuro Manabe, Kiyoshi Ishikawa (2011)

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DOI: 10.20965/IJAT.2011.P0349

access: closed

type: Journal Article

metadata version: 2020-07-09

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  - https://dblp.org/rec/journals/ijat/TaniguchiMI11
Jun Taniguchi, Tetsuro Manabe, Kiyoshi Ishikawa:
Fabrication of Less than 20-nm-Diameter Nanodot Arrays Using Inorganic Electron Beam Resist and Post Exposure Bake. Int. J. Autom. Technol. 5(3): 349-352 (2011)

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