"A MEMS Device Integrating Multiple Cantilever Displacement Sensors to ..."

Hiroki Shimizu et al. (2022)

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DOI: 10.20965/IJAT.2022.P0582

access: closed

type: Journal Article

metadata version: 2022-09-29

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Hiroki Shimizu, Koichi Tamiya, Shoichiro Mizukami, Yuuma Tamaru:
A MEMS Device Integrating Multiple Cantilever Displacement Sensors to Evaluate Flat Machined Surfaces. Int. J. Autom. Technol. 16(5): 582-587 (2022)

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