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"Sub-Nanometer Positioning Combining New Linear Motor with Linear Motion ..."
Jiro Otsuka, Toshiharu Tanaka, Ikuro Masuda (2009)
- Jiro Otsuka, Toshiharu Tanaka, Ikuro Masuda:
Sub-Nanometer Positioning Combining New Linear Motor with Linear Motion Ball Guide Ways. Int. J. Autom. Technol. 3(3): 241-248 (2009)
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