"Nanometer-/Subnanometer-Positioning Technology Using Feeding Mechanism."

Jiro Otsuka (2008)

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DOI: 10.20965/IJAT.2008.P0004

access: closed

type: Journal Article

metadata version: 2020-07-09

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Jiro Otsuka:
Nanometer-/Subnanometer-Positioning Technology Using Feeding Mechanism. Int. J. Autom. Technol. 2(1): 4-11 (2008)

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