"Fabrication of a Two-Dimensional Diffraction Grating with Isolated ..."

Hiraku Matsukuma et al. (2020)

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DOI: 10.20965/IJAT.2020.P0546

access: closed

type: Journal Article

metadata version: 2024-07-03

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Hiraku Matsukuma, Masanori Matsunaga, Kai Zhang, Yuki Shimizu, Wei Gao:
Fabrication of a Two-Dimensional Diffraction Grating with Isolated Photoresist Pattern Structures. Int. J. Autom. Technol. 14(4): 546-551 (2020)

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