"Development of New Complex Machining Technology for Single Crystal Silicon ..."

Tsuneo Kurita et al. (2016)

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DOI: 10.20965/IJAT.2016.P0786

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type: Journal Article

metadata version: 2020-07-09

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Tsuneo Kurita, Koji Miyake, Kenji Kawata, Kiwamu Ashida, Tomohisa Kato:
Development of New Complex Machining Technology for Single Crystal Silicon Carbide Polishing. Int. J. Autom. Technol. 10(5): 786-793 (2016)

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