"Development of a Microprobing System for Side Wall Detection Based on ..."

So Ito et al. (2020)

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DOI: 10.20965/IJAT.2020.P0091

access: closed

type: Journal Article

metadata version: 2020-07-09

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  - https://dblp.org/rec/journals/ijat/ItoSKMK20
So Ito, Yusuke Shima, Daichi Kato, Kimihisa Matsumoto, Kazuhide Kamiya:
Development of a Microprobing System for Side Wall Detection Based on Local Surface Interaction Force Detection. Int. J. Autom. Technol. 14(1): 91-98 (2020)

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