"Ultra Precise Positioning of a Stage Driven by Pneumatic Bellows."

Toshinori Fujita et al. (2011)

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DOI: 10.20965/IJAT.2011.P0508

access: closed

type: Journal Article

metadata version: 2021-10-14

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  - https://dblp.org/rec/journals/ijat/FujitaSTKK11
Toshinori Fujita, Kazutoshi Sakai, Yusuke Takagi, Kenji Kawashima, Toshiharu Kagawa:
Ultra Precise Positioning of a Stage Driven by Pneumatic Bellows. Int. J. Autom. Technol. 5(4): 508-515 (2011)

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