"On-Demand MEMS Device Production System by Module-Based Microfactory."

Kiwamu Ashida et al. (2010)

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DOI: 10.20965/IJAT.2010.P0110

access: closed

type: Journal Article

metadata version: 2020-07-09

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Kiwamu Ashida, Shizuka Nakano, Jaehyuk Park, Jun Akedo:
On-Demand MEMS Device Production System by Module-Based Microfactory. Int. J. Autom. Technol. 4(2): 110-116 (2010)

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