"Case study and efficient modelling for variational chemical-mechanical ..."

Xinyi Zhang et al. (2008)

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DOI: 10.1049/IET-CDS:20070187

access: closed

type: Journal Article

metadata version: 2020-09-10

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  - https://dblp.org/rec/journals/iet-cds/ZhangHGST08
Xinyi Zhang, Lei He, Vassilios Gerousis, Li Song, C. C. Teng:
Case study and efficient modelling for variational chemical-mechanical planarisation. IET Circuits Devices Syst. 2(1): 30-36 (2008)

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