"Si3N4: HfO2 dual-k spacer bulk planar ..."

Ramarao Garike, Ganesh C. Patil (2019)

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DOI: 10.1049/IET-CDS.2018.5168

access: closed

type: Journal Article

metadata version: 2020-09-10

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Ramarao Garike, Ganesh C. Patil:
Si₃N₄: HfO₂ dual-k spacer bulk planar junctionless transistor for mixed signal integrated circuits. IET Circuits Devices Syst. 13(1): 45-50 (2019)

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