"Vapor Deposition of Fluoropolymer Thin Films for Antireflection Coating."

Soma Yasui, Fujio Ohishi, Hiroaki Usui (2023)

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DOI: 10.1587/TRANSELE.2022OMP0006

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type: Journal Article

metadata version: 2023-06-24

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Soma Yasui, Fujio Ohishi, Hiroaki Usui:
Vapor Deposition of Fluoropolymer Thin Films for Antireflection Coating. IEICE Trans. Electron. 106(6): 195-201 (2023)

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