"Rapid-Thermal Annealing of Amorphous Silicon on Oxide Semiconductors."

Saurabh Saxena, Jin Jang (2010)

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DOI: 10.1587/TRANSELE.E93.C.1495

access: closed

type: Journal Article

metadata version: 2020-04-11

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Saurabh Saxena, Jin Jang:
Rapid-Thermal Annealing of Amorphous Silicon on Oxide Semiconductors. IEICE Trans. Electron. 93-C(10): 1495-1498 (2010)

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