"Evaluation of Dielectric Reliability of Ultrathin ..."

Yanli Pei et al. (2007)

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DOI: 10.1093/IETELE/E90-C.5.962

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type: Journal Article

metadata version: 2020-04-11

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Yanli Pei, Hideki Murakami, Seiichiro Higashi, Seiichi Miyazaki, Seiji Inumiya, Yasuo Nara:
Evaluation of Dielectric Reliability of Ultrathin HfSiO_xN_y in Metal-Gate Capacitors. IEICE Trans. Electron. 90-C(5): 962-967 (2007)

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