"Nitrogen Adsorption of Si(100) Surface by Plasma Excited Ammonia."

P. Pungboon Pansila et al. (2015)

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DOI: 10.1587/TRANSELE.E98.C.395

access: closed

type: Journal Article

metadata version: 2020-04-11

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P. Pungboon Pansila, Kensaku Kanomata, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose:
Nitrogen Adsorption of Si(100) Surface by Plasma Excited Ammonia. IEICE Trans. Electron. 98-C(5): 395-401 (2015)

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