"A Study on Si(100) Surface Flattening Utilizing Sacrificial Oxidation ..."

Sohya Kudoh, Shun'ichiro Ohmi (2015)

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DOI: 10.1587/TRANSELE.E98.C.402

access: closed

type: Journal Article

metadata version: 2020-04-11

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  - https://dblp.org/rec/journals/ieicet/KudohO15
Sohya Kudoh, Shun'ichiro Ohmi:
A Study on Si(100) Surface Flattening Utilizing Sacrificial Oxidation Process and Its Effect on MIS Diode Characteristics. IEICE Trans. Electron. 98-C(5): 402-405 (2015)

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