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"Modeling the Effect of Global Layout Pattern on Wire Width Variation for ..."
Daisuke Fukuda et al. (2015)
- Daisuke Fukuda, Kenichi Watanabe, Yuji Kanazawa, Masanori Hashimoto:
Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-the-Fly Etching Process Modification. IEICE Trans. Fundam. Electron. Commun. Comput. Sci. 98-A(7): 1467-1474 (2015)
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