"A linear model based noise evaluation of a capacitive servo-accelerometer ..."

Yusaku Yoshida et al. (2005)

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DOI: 10.1587/ELEX.2.198

access: open

type: Journal Article

metadata version: 2021-02-12

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Yusaku Yoshida, Hideaki Kakuma, Hiroshi Asanuma, Hiroaki Niitsuma:
A linear model based noise evaluation of a capacitive servo-accelerometer fabricated by MEMS. IEICE Electron. Express 2(6): 198-204 (2005)

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